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MEMS
Featured Projects

Hermetic Bonding for Optical Feed-through
To develop reliable and feasible hermetic packaging methods to ensure mechanical durability as well as insulation from electrical leakage for an optical feed-through operating in highly variable temperature environments

MEMS Packaging Optimization
To improve MEMS device performance over temperature and drop-shock through optimization from predictive modeling, and to identify novel materials and/or methods for packaging

MEMS Supercapacitor
To develop a simple, yet versatile MEMS supercapacitor using porous carbon nanotube (CNT) forests as electrodes with low contact resistance
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NEMS
Featured Projects

Tunable TiO2 Nanosword Plasmonic Antenna
This work focuses on integrating the nanoswords with MEMS to create a tunable plasmonic antenna for SERS detection. Efforts have begun to design a two-dimensional SOI-based actuator to mitigate the alignment issues, while in-situ SEM imaging has revealed that the nanoswords are planar. In addition, efforts have begun to use FIB to etch a plasmonic grating onto the gold-coated nanoswords to control the plasmonic resonance.

Direct-write Piezoelectric PVDF Nanogenerator via Near-Field Electrospinning
To address the mechanical energy scavenge limitations with a new architecture: electrospun piezoelectric nanofibers

Thermal Imaging of Single Living Cells
To realize in-vivo temperature measurements via quantum dots (QDs) for the generation of thermal images of single living cells
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Nanomaterials
Featured Projects

Room Temperature Synthesis of Carbon Nanotubes
To develop a microelectronics-compatible synthesis method for carbon nanotubes with applications including CMOS-integrated sensors

Micro-CVD for Nanostructure Synthesis
To miniaturize the conventional chemical vapor deposition (CVD) system to provide better control on the gas flow, temperature, and species, for the synthesis of unique nanostructures with new properties

Rapid Synthesis of Nanostructures via Induction Heating
To quickly prototype novel and existing vapor-liquid-solid-grown nanomaterials for sensor applications, and open up a new class of nanomaterial synthesis
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BioMEMS
Featured Projects

Novel Microfluidic Trapping and Arraying of Particles and Droplets
To develop new techniques for immobilizing and arraying particles (i.e. microbeads) and/or droplets within a microfluidic device

Microfluidic Molecular Beacon-Based SNP Genotyping
To utilize molecular beacon probes to achieve multiplexed, high throughput and cost-effective detection of the most common form of variation in the human genome: single nucleotide polymorphisms (SNPs)

Micropost Arrays for Unidirectional Cellular Guidance
To develop microtopographic substrates capable of inducing cellular migration in a single, designed direction
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Energy
Featured Projects

Dielectrophoretic Manipulation of Bacteria for Energy and Biological Applications
To employ dielectrophoresis (DEP) to manipule specific bacteria for use in microbial fuel cells (MFCs)

Facile Synthesis of Nanostructures for Renewable Energy Applications
To employ nanostructures synthesized by inductive heating in renewable energy applications

Biomass Powered Energy Harvester
To miniaturize the conventional chemical vapor deposition (CVD) system to provide better control on the gas flow, temperature, and species, for the synthesis of unique nanostructures with new properties
About Us
The Liwei Lin Lab at UC Berkeley focuses on applying the principles of mechanical engineering to a wide range of applications in growing fields, including MEMS (Microelectromechanical Systems), NEMS (Nanoelectromechanical Systems), Nanotechnology, Synthesis of Nanomaterials, BioMEMS (Biological Microelectromechanical Systems), Microfluidics, Plasmonics, and Energy.
News & Awards
- Sep 17, 2009 - Yingqi Jiang wins Best Poster Award for "MEMS Supercapacitor" at Fall 2009 BSAC IAB meeting
- Jul 1, 2009 - Erika Parra's "Biomass Powered Energy Harvester" is featured in Nikkei Microsystems
- Jun 25, 2009 - Brian Sosnowchik, Chieh Chang, Ryan Sochol and Adrienne Higa give oral presentations, and Mike (Yiin-Kuen) Fuh gives a poster presentation at the Transducers 2009 conference in Denver, CO
- Jun 20, 2009 - Prof. Liwei Lin delivers a talk on "MEMS/NEMS Technologies for Information Devices" at the Joint Conference on Micromechatronics for Information and Precision Equipment in Tsukuba, Japan