All-Carbon Based Flexible Humidity Sensor

Flexible humidity sensors play important roles in wearable devices and consuming electronics which provide a convenient way between digital and physical worlds. This work presents an easy fabricated method for flexible humidity sensors all based on carbon material including electrodes and functional layers. The interdigital electrodes are made by direct laser writing on commercial Kapton tapes and the transferring to flexible Polydimethylsiloxane (PDMS) substrates. The humidity sensing material is reduced graphene oxide (rGO) in nanometer thickness by electrospray. The rGO flakes covered the micro-size laser induced graphite (LIG), forming rGO-graphite balls, dramatically increase surface areas to interact with water molecules. The results show high precision sensitivity and fast response time for adsorption (0.9 s) and desorption (4.5 s). This method provides a novel method for fabricating cost-effective flexible humidity sensors.